Micro-machined deep silicon atomic vapor cells

Brain responses to micro-machined silicon devices.

Micro-machined neural prosthetic devices can be designed and fabricated to permit recording and stimulation of specific sites in the nervous system. Unfortunately, the long-term use of these devices is compromised by cellular encapsulation. The goals of this study were to determine if device size, surface characteristics, or insertion method affected this response. Devices with two general desi...

Oxidation smoothening of silicon machined micro- and nano-scale structures

Highly Compact Micro-machined Coplanar

Highly compact micro-machined coplanar bandpass filters based on end-coupled half-wavelength and quarter-wavelength resonators topologies have been investigated. Simple gap and interdigitated capacitive discontinuities have been modeled through an appropriate technique and have been implemented in order to achieve low loss and narrow bandpass membrane micromachined filters. Excellent performanc...

Potential Stable Low-Permeation Rate Standard Based on Micro-machined Silicon

Silicon wafers with micro-machined holes were evaluated for use as low-permeation-rate standard artifacts. Accuracy, stability, and reliability were assessed. Two independent experimental techniques for evaluating permeation were used: chilled mirror hygrometer and mass loss. The wafers exhibited a well-defined linear relationship between hole area and resultant water partial pressure for both ...

A Micro-Machined Gyroscope for Rotating Aircraft

In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carr...